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AMETEK - Thermal Vacuum Heater Power - TVAC Satellite Chamber
Total power subsystem integration
- Ethernet communication
- Full sub-system wiring
- Single P.O.
- Custom interface to suit customer requirements
|
Description |
TVAC Satellite Chamber |
|---|---|
|
Industry |
Space Power |
|
Application |
Power Bus |
|
Function |
Provides programmable power to heater elements |
More Product Information
Provides 15,000A DC at 5V DC in current mode
- Single complete package
- Integrated bus bars
- Current mode Analog programming
- Input 400VAC, 220A/ph, Delta
Flexibility
- Different substrate carriers for wafers up to 150 mm or single dies
- Up to six positioners
- Optional thermal chuck (-60°C to 300°C) and pressure regulation
- Probing with an open chamber lid possible under atmospheric condition
- Specially designed for laboratory environments
- Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
See "Specifications & Details" tab for more key features
- Highest Power Density
- Comprehensive Digital and Analog Interface Options
- Scalable, Multi-Unit Design
- Multi-Channel Support
- Straightforward Front Panel Controls
- High Reliability
- Vacuum pump to pick up small cable samples
- Suitable for the cable measuring device VCPLab and the cable o ring cutter ORC Micro
Specially modified design allows:
- Air to water heat exchanger added to system
- True current source
- Fast transient response
- Little to no current overshoot
- Low stored energy
- The SL164 is characterized as a Compact High Intensity Spot Light with sufficient thermal management to provide 200kLux at a working distance of 4” (100mm).
- A very wide range of wavelengths are available from UV to IR.
- Multiple beam spreads are also available as is a diffuser option.
Environmental Control
- Wafer temp verified <4.5 K (with 44 RF probes in contact)
- Magnetic field suppression to <200 nT
- Highly uniform wafer temperature
- Precise thermal stability and control
- Solid construction with granite base enables precision motion and vibration control
See "Specifications & Details" tab for more key features
- High power density / low ripple and noise
- High programming resolution with Ethernet interface
- Constant voltage and current mode
- Remote sensing
- Isolated analog control and monitoring (optional)
- 2 independent, isolated 600W channels or 1 1200W channel in 1U
- Voltage: 40 V to 220 V
- Current: 2.72A to 20A
- 2μ second shunt switching recovery
- Peak Power Tracking
- Primary and secondary over voltage and over current
- Output electronic circuit breaker
- Built in fault data recorder
- Power On Self-Test
- Active power factor correction (PFC)
- Color touch panel monitoring
- Standard LAN interface
- Full remote control via AMETEK SAS software or SCPI commands
AMETEK Programmable Power
Programmable Precision AC & DC Sources, Loads and Custom Power Solutions
