Flexibility

• Different substrate carriers for wafers up to 150 mm or single dies
• Up to six positioners
• Optional thermal chuck (-60°C to 300°C) and pressure regulation
• Probing with an open chamber lid possible under atmospheric condition
• Specially designed for laboratory environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

See "Specifications & Details" tab for more key features

PureLine 3 Technology

• Provides an effectively noise free environment around the device under test (DUT)
• First automated probe station to achieve -190dB spectral noise*
• Up to 32x lower noise (1kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications
• Eliminates over 97% of the environmental noise experienced in previous probe systems
• Extensive collection of FormFactor patents, electrical design knowledge, and measurement system IP

Plug In and Go

• World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
• Eliminates all ground-loop induced TestCell noise
• Low field emissions
• Provides fully managed and filtered AC power to the entire system, prober and instruments

See "Specifications & Details" tab for more key features

• DC-40 GHz bandwidth
• 10 ps rise time
• Low insertion and return loss
• 2 mils of tip-to-tip compliance
• High probing angle and clearance

The LWP series Lightwave Probe enables optical measurements for on-wafer and hybrid photonics devices. It features user replaceable fiber pigtails allowing the probe to be optimized for a variety of light delivery and light collection applications including the characterization of topside illuminated photodiodes, Vertical Cavity Surface Emitting Lasers (VCSELs), hybrid transmitters and receivers, and LEDs.

• Highest resolution – 12 bits all the time 
• More capability – integrates multiple instruments into one 
• Comprehensive probe support – supports over 30 probes in 9 categories 
• MAUI with OneTouch user interface for intuitive and efficient operation

• High performance power bypassing provides low-impedance and resonant-free connections to 20 GHz
• RF bandwidth to 500 MHz
• Long probe life: > 250,000 contacts
• Beryllium-copper tips for gold pads or tungsten for aluminum pads
• Oscillation-free testing of wide-bandwidth analog circuits
• Use with ACP series probes to provide functional at-speed testing for known-good-die
• Mix multiple contact types: Ground, Power (Standard or Eye-Pass), Logic/Signal
• Low and repeatable contact resistance on aluminum pads ( < 0.25 Ω on Al, < 0.01 Ω on Au)

• Power bypass inductance: 8 nH
• Standard DCQ probes have flat tip needles available in nickel-plated tungsten or BeCu with diameters of 0.75 mil, 1.0 mil and 1.5 mil.
• Supports collinear and non-standard needle configurations
• Up to 16 DC for standard; maximum of 24 DC for custom
• Ideal for probing the entire circuit for functional test
• DC probes can provide power or slow logic to circuit under test

With the ProBus interface, the ZD500, 1000, and 1500 becomes an integral part of the oscilloscope. All probe gain and offset controls are transparent to the user, making it easier to probe the circuit without concern for which gain setting to choose. When used with a LeCroy digital oscilloscope, no external power supply is required.