FormFactor - Cascade IMS-K-mmW/THz - Integrated Measurement System with Keysight VNA for S-parameters from RF to mmW to THz
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight PNA for On-wafer R&D Measurements from RF to millimeter wave to Terahertz
Industry’s Most Productive and Accurate S-Parameter Measurement System
FormFactor’s Autonomous RF Measurement Assistant automates S-parameter measurements for continuous 24/7 testing, to triple device throughput and ensure accurate data through automatic calibration monitoring, instrument re-calibration and camera-guided adaptive probe placement on every device, even at multiple temperatures -60°C to +200°C. Tightly integrated instrumentation from industry leader Keysight completes the system to deliver best possible measurement accuracy and repeatability.
Fastest, Safest, and Most Affordable Path to High Quality Measurements
Pre-validated, turn-key, comprehensive, integrated measurement systems from FormFactor deliver peace of mind and immediate, out-of-the-box productivity for important test applications.
These benefits are provided at no extra cost. IMS solutions from FormFactor include no markups over Keysight pricing or integration charges.
Only one S-parameter system in the world is built upon the foundations of the #1 leader in R&D instrumentation plus the #1 leader in analytical probe systems – the FormFactor IMS-K-mmW/THz.
Applications
- RF/mmW
FormFactor and partner Keysight applications experts will help you configure a robust, complete solution, including:
- FormFactor probe system: CM300xi, SUMMIT200, EPS150RF, EPS150MMW (others available)
- Manual, semi-automatic and fully automatic probes station options
- FormFactor analytical probes: Infinity, InfinityXT, T-Wave (others available) on manual or motorized positioners
- FormFactor calibration accessories: WinCal, Impedance Standard Substrate for LRRM, Multiline TRL Cal Substrate calibrations (others avail.)
- FormFactor RF automation software: Autonomous RF Measurement Assistant for improved uncertainty and throughput optional)
- Full over temperature measurements and automation from -60°C to +200°C
- Keysight vector network analyzer and frequency extenders up to 130GHz : N5290A/91A PNA MM-Wave, N524xB PNA-X, N522xB PNA (others available)
- Keysight automation and modeling software: WaferPro XP, PathWave, IC-CAP
- Virginia Diodes (VDI) Mini frequency extenders for measurement from 75GHz to 1.1THz (optional)
- Easy swap RF application arms for mounting RF coax, mm-wave coax, waveguide extenders and load-pull tuners
- To complete the system: cables, adapters, mounting hardware, etc.
More Product Information
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Best price per contact – typically over one million (1,000,000) touchdowns
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RF/Microwave signal is shielded and completely air isolated in the probe body
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Excellent performance in vacuum environments and temperatures as low as 4 K, or as high as 300°C
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Highest impedance control with perfectly-symmetrical, MEMS-machined coplanar contact structure
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Probe on any pad material with minimal damage
Flexibility
- Different substrate carriers for wafers up to 150 mm or single dies
- Up to six positioners
- Optional thermal chuck (-60°C to 300°C) and pressure regulation
- Probing with an open chamber lid possible under atmospheric condition
- Specially designed for laboratory environments
- Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
See "Specifications & Details" tab for more key features
Flexibility
- Application flexibility: Coax, Triax, RF/mmW, High Power, Double Sided
- Temperatures range from -60°C to +300°C
- Surfaces are nickel or gold-plated
- Hybrid chuck design – operation with and without cooling unit
- Field-upgradeable: On-site cold upgrades for all main prober platforms
Highest Efficiency for Reduced Cost of Test
- Up to 25% lower air consumption (CDA) than other systems on the market with no compromise in transition times
- Up to 15% faster transition times than other systems on the market
- Up to 12 contacts; any contact can be DC, Power, Logic to 500 MHz,or RF to 20 GHz
- Online design configuration tool helps you to specify your probe in minutes
- All designs are fully quadrant compatible
- Full solution includes probes, calibration substrates, stations, accessories and software
- Scalable architecture for future needs
T-Wave Waveguide Banded Probes
- Low insertion loss
- Low contact resistance
- 140 GHz – 1.1 THz versions
- Probe pitch as narrow as 25 μm
- Lithographically-defined probe tip
- Nickel contacts
See "Specifications & Details" tab for more key features
Superior Mechanics
- Highly stable granite base
- Independent, coarse movement of X and Y axes, combined with easy fine adjustments
- Excellent measurement accuracy and repeatability
- Fast navigation and high-precision probe positioning
See "Specifications & Details" tab for more key features
Floating Action Buttons
- Easy and fast setup of camera views
- Go to Light and Image Settings of the selected camera view with only one mouse click
Workflow Wizard
- Guided workflows for wafer setups, alignment tools and Autonomous Assistants
- Workflow wizard shows task-relevant settings and options only
- Wizard settings can be corrected anytime – no need to restart the wizard
- Wizard helps with intelligent solutions in case of error
See "Specifications & Details" tab for more key features
- Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
- Guarantees fully-guarded measurements to fA and fF levels
- Individual connectors provide force-sense connection for quasi-Kelvin and CV measurements
- Allows probing of different pad materials and sizes
- Fast replacement of worn probes without the need for tools
- Enables wafer probing up to 100 A pulsed and 10A DC
- Innovative multi-fingertip design provides even distribution of current
- Supports up to 500 V
- Replaceable Tungsten probe tips
- Temperature range of -60°C to 300°C
- Minimal contact resistance at the pad-tip junction to reduce heating during measurements, with fewer probe marks
- Prevents against thermal runaway
- Measure devices on wafer at higher currents than ever before
- Small scrub minimizes damage to aluminum pad
- Small footprint – tip fits on a 1 mm pad
FormFactor, Inc.
Website
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
