Flexibility

• Different substrate carriers for wafers up to 200 mm or single dies
• Probe cards and/or up to eight positioners
• Use with liquid nitrogen or helium, depending on the target temperature. Or use of cryo-cooler for dry-cooling option.
• Accessories available, such as black bodies and optical motion analysis tools
• Optional upgrade for 300 mm wafer
• Designed for industrial environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
• Ideal for small structures

See "Specifications & Details" tab for more key features

More than a calibration tool

• Calibration
• Validation
• Measurement
• Analysis

No one supports more VNA’s

• Support of more than 24 of the most common VNA’s

Tool for the novice

• Guided wizards and multimedia tutorials integrated
• Intelligence in setups

See "Specifications & Details" tab for more key features

• Lithographic thin-film construction
• Excellent crosstalk characteristics
• Non-oxidizing nickel alloy tips
• Innovative force delivery mechanism
• 40GHz, 50GHz, 67GHz, 110GHz and 145GHz connectors available
• GSG, SG, GS, GSGSG, GSSG, SGS configurations
• 50 to 250 µm pitches (other pitches available on request)
• High current version (2 A) available

Advantages

• Superior field confinement reduces unwanted couplings to nearby devices and transmission modes
• Superior measurement accuracy and repeatability
• Small scrub minimizes damage to aluminum pad
• Typical contact resistance < 0. 05 Ω on Al, <0.02Ω on Au
• Save valuable wafer space and reduce pad parasitics by being able to shrink pad geometries to 25 x 35 µ m (best case)

• Built to Endure: Engineered with military-grade durability, IntelliShield is designed to withstand extreme temperatures, humidity, dust, and vibration. This high-temperature UPS ensures your critical systems continue to operate in the most harsh environments.
• Mission-Critical Reliability: Trusted in military and industrial applications, IntelliShield provides uninterrupted power backup to safeguard against power disruptions that could affect your operations.
• Seamless Integration: The IntelliShield can be easily and seamlessly integrated into your existing infrastructure with minimal downtime. Our units are designed for easy installation and compatibility with a wide range of equipment, it ensures power stability and smooth transitions.
• Extended Power Backup: With extended battery backup options, IntelliShield ensures your operations stay online during prolonged power outages, giving you the time needed to safely shut down systems or maintain productivity until power is restored.
• Peace of Mind Support: Our dedicated customer support team is available to assist from installation to End-of-Life, ensuring your Rugged UPS performs when you need it most.

Three Probe Technologies

• Infinity Probe: best for Al (Si)
• ACP Probe: best for AU (III-Vs)
• |Z| Probe: robust solution (long lifetime)
• Precision contact on a wide variety of materials from 26 GHz to 67 GHz
• Accurate results with excellent crosstalk
• Matching cables and substrates included

Precise Contact Solution

• RF chuck ±3 μm surface planarity
• Unique 500 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
• Precision probe alignment
• Consistent contact force and overtravel
• Stable contact performance

WinCal Calibration Software

• Exclusive 1-, 2-, 3-, and 4-port on-wafer calibration algorithms
• Automated calibration monitoring
• Unique measurement & analysis methods
• Accurate S-parameter measurements
• Automatic calibration setup for higher efficiency
• Fast and easy data interpretation and reporting

• Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
• Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
• Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
• Durable probe structure ensures more than 250,000 contacts
• Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications

• DC-40 GHz bandwidth
• 10 ps rise time
• Low insertion and return loss
• 2 mils of tip-to-tip compliance
• High probing angle and clearance