FormFactor - HPD Model HE-3-SSV-PT-2 - Dry Helium-3 Cryostat
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Cryogen-free: cooling with two-stage pulse tube refrigerator (PTR)
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Low vibration
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Mechanical heat switch
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Internal charcoal sorption pump
The Model HE-3-SSV-PT-2 is a single shot, cryogen-free, helium-3 cryostat for cooling samples in vacuum. It uses a two-stage pulse tube refrigerator (PTR) for initial system cool down.
Highly conductive flexible thermal links made from multiple strands of fine OFHC copper wires are used as thermal link between the two stages of PTR and both radiation shields. This design significantly reduces the vibrations that may be transmitted to the He-3 stage from the PTR.
Mechanical heat switches are used for the system operations.
An internal charcoal sorption pump is used to reduce the vapor pressure of the liquid He-3 and cool it down to its base temperature.
With our optimized design of the heat exchanger on the second stage regenerator of PTR, no additional compressor is needed for He-3 condensation.
The system is supplied with a complete set of thermometers and heaters to monitor and control the temperature of the various stages of the cryostat.
It also includes all the necessary valves and pressure gauges for safe and reliable system operation.
More Product Information

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Different substrate carriers for wafers up to 150 mm or single dies
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Up to six positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Ergonomic and straightforward design
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Intuitive, manual operation
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Independent control of linear chuck stage and positioners
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Contact/separation stroke for probe platen

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Re-configurable for DC, RF, mmW, FA, WLR and more
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Thermal range: -60˚C to 300˚C available
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Upgrade path to meet your future needs
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Stable and repeatable measurements over a wide thermal range
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Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
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Advanced EMI-shielding with PureLine with AttoGuard technologies
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Best solution for low-noise and 1/f measurements
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Minimize AC and spectral noise
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Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
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Locking roll-out stage
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Innovative microscope remote control
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Intuitive ergonomic stage controls
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Quick, safe, and comfortable wafer access
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Easy on-wafer navigation
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Fast setup and test data gathering
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Dedicated Velox version for manual probe stations
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AugmentedAlign tool with on screen markers for improved RF measurement accuracy

- Frequency range of 9 kHz to 3.6 GHz/6 GHz/26.5 GHz/44.5 GHz; 44.5 GHz max. built-in preamp option
- Best close-in phase noise performance in middle range signal analyzer/spectrum analyzer:
- –123 dBc/Hz (at 1 GHz center frequency, 10 kHz offset frequency with all frequency models)
- –138 dBc/Hz (at 1 GHz center frequency, 10 kHz offset frequency with 3.6 GHz and 6 GHz models, meas.)
- –140 dBc/Hz (at 150 MHz center frequency, 10 kHz offset frequency with 3.6 GHz and 6 GHz models, meas.)
- 31.25 MHz analysis bandwidth (standard); 125 MHz max. (option)
- All-in-one solution with built-in signal generator option supports TRx tests (with 3.6 GHz and 6 GHz models)
- Measurement applications (options): Phase Noise Measurement, Noise Figure Measurement, Vector and Analog Modulation Analysis, BER Measurement, Pulse Radar Measurement Function

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Wafer temp verified <4.5 K (with 44 RF probes in contact)
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Magnetic field suppression to <200 nT
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Easy exchange of customizable probe cards
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Configurable for 150 mm, 200 mm and 300 mm wafers
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Options for fully automated wafer load or manual
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Complete software suite for manual, semi-auto, or fully automated probing
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25 wafer cassette capacity for fully automated testing
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~15 minute cooldown time per wafer

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Die-to-die stepping time of under 100 ms
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Up to 20 dies/sec (70,000 dies/hour) with MultiDie Testing technology
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Even extreme variations in height, such as the case with warped wafers, can be compensated
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Interfaces to all major analysis instrumentation, optics software and testers
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Access to top side and bottom side of device under test (DUT)
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Highly accurate light measurement
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Test automation out-of-cassette for 24/7 operation

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Combined eye-pieces and CCD camera mount
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3x zoom and quick lens exchange
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Engraved guides on mmW platen
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Supports broadband, load pull, coax RF and banded waveguide configuration
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Rock-solid mechanical design
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Submicron stage accuracy

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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Joystick controller
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Manual probe positioners with rotary feed-throughs
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
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User-centered design minimizes training costs and enhances efficiency

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Monochrome (G-031B) and color (G-031C) models
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GigE Vision interface with Power over Ethernet option
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Screw mount RJ45 Ethernet connector for secure operation in industrial environments
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Supports cable lengths up to 100 meters (CAT-6 recommended)
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Comprehensive I/O functionality for simplified system integration
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Popular C-Mount lens mount
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Easy camera mounting via standard M3 threads on top and bottom of housing or optional tripod adapter
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Easy software integration with Allied Vision's Vimba Suite and compatibility to the most popular third party image-processing libraries.


FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
