FormFactor - Cascade PM300 - 300 mm manual probe system
Superior Mechanics
- Highly stable granite base
- Independent, coarse movement of X and Y axes, combined with easy fine adjustments
- Excellent measurement accuracy and repeatability
- Fast navigation and high-precision probe positioning
See "Specifications & Details" tab for more key features
Precise and Stable 300 mm Probing
The PM300 Analytical Probe Station is the industry benchmark in manual semiconductor failure analysis and in-process testing. The superior mechanics of this versatile probe system deliver a stable and precise system setup regardless of your application.
The PM300 is available as open or shielded system PM300PS.
The PM300PS manual analytical probe system creates a measurement environment free from electromagnetic (EMI) and radio-frequency interference (RFI) for device characterization and modeling, process development, wafer-level reliability, failure analysis and 3D IC engineering test.
Applications
Failure Analysis IV/CV Reliability RF/mmW/THz
High Flexibility
- Re-configurable for DC, RF, mmW, FA, WLR and more
- Thermal range of -60°C to +200°C (PM300PS) and +15°C to +300°C (PM300)
- Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
- 40 mm platen height adjustability
- Upgrade path to meet your future needs
- Fast transition between wafer and packaged device test
Ease of Use
- Low-profile, straightforward design
- Spacious top chambers for up to 12 positioners
- Easy and ergonomic operation
Shielding
- Reduces electrical noise by providing a fully electromagnetically shielded, ultra-low-noise, light-tight environment
- Enables accurate low-noise measurements of atto amperes, femtofarads and microvolts at temperatures down to -60°C
- Ideal conditions for sensitive applications such as 1/f noise measurements
- Thermal range of -60°C to +200°C available
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More Product Information
High flexibility
- Re-configurable for DC, RF, mmW, FA, WLR and more
- Thermal range: -60˚C to 300˚C available
- Upgrade path to meet your future needs
- Stable and repeatable measurements over a wide thermal range
See "Specifications & Details" tab for more key features
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight SPA for On-wafer DC Parametric Measurements
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Functional temperature range of -263 to +150°C
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Stainless steel tip material for thermal decoupling
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Coaxial cable with TCE matched inner and outer conductors
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Consistent tip geometry even at cryogenic temperatures
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight Photonics Application
- Ideal for multiport RF/Microwave and high-speed digital signal testing
- Mix DC and RF/Microwave signals on one probe
- Long lifetime – typically over one million (1,000,000) touchdowns
- Excellent performance in temperatures ranging from 10 K to 200°C
- Probe on any pad material with no damage
The LWP series Lightwave Probe enables optical measurements for on-wafer and hybrid photonics devices. It features user replaceable fiber pigtails allowing the probe to be optimized for a variety of light delivery and light collection applications including the characterization of topside illuminated photodiodes, Vertical Cavity Surface Emitting Lasers (VCSELs), hybrid transmitters and receivers, and LEDs.
Measurement Accuracy
- Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
- Minimize AC and spectral noise with effective shielding capability
- Achieve unsurpassed RF/mmW measurement and calibration accuracy with integrated RF tools and WinCal
- Shortest signal path test integration for accurate, thermally stable, and low-error data collection
See "Specifications & Details" tab for more key features
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Die-to-die stepping time of under 100 ms
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Up to 20 dies/sec (70,000 dies/hour) with MultiDie Testing technology
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Even extreme variations in height, such as the case with warped wafers, can be compensated
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Interfaces to all major analysis instrumentation, optics software and testers
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Access to top side and bottom side of device under test (DUT)
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Highly accurate light measurement
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Test automation out-of-cassette for 24/7 operation
See more Key Features on Specifications & Details tab
Gold-plated TESLA High-power MicroVac™ Chucks
- Prevent thin wafers from curling and breaking
- Advanced MicroVac chuck surface for minimum contact resistance between wafer and chuck
- Accurate Rds(on) measurement at high current
- Accurate UIS measurements at high temperature
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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