Next Generation Wafer Probing

• Continues the Infinity family’s Industry leading electrical performance
• High temperature capability (175° C +) for automotive device characterization and other applications
• Better tip visibility for enhanced placement accuracy and repeatability
• Improved tip life/durability with solid rhodium contacts
• New tip architecture enables support for narrower pitches (e.g. 25um)
• Advanced mechanical design combined with small contacts enables probing on smaller pads/pitches and improves durability and robustness

Gold-plated TESLA High-power MicroVac™ Chucks

• Prevent thin wafers from curling and breaking
• Advanced MicroVac chuck surface for minimum contact resistance between wafer and chuck
• Accurate Rds(on) measurement at high current
• Accurate UIS measurements at high temperature

Flexibility

• Different substrate carriers for wafers up to 150 mm or single dies
• Up to six positioners
• Optional thermal chuck (-60°C to 300°C) and pressure regulation
• Probing with an open chamber lid possible under atmospheric condition
• Specially designed for laboratory environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

See "Specifications & Details" tab for more key features

• Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
• Guarantees fully-guarded measurements to fA and fF levels
• Individual connectors provide force-sense connection for quasi-Kelvin and CV measurements
• Allows probing of different pad materials and sizes
• Fast replacement of worn probes without the need for tools

Optimized Measurement Setup

• Multi-purpose SIGMA instrument integration kit
• Shorter cabling and universal chuck connection
• Triax probe with protected guard
• Optimized signal path
• Safe probe tip exchange
• Seamless integration of various analyzers

High Power Chuck

• Triax design for low-leakage measurements up to 3 kV
• Special chuck surface coating
• High-isolation ready
• High-current measurement up to 100 A with lowest contact resistance
• Optional upgrade for 10 kV (coax) operating voltage
• Thin wafer handling capability

Safe Operation

• Arcing protection
• Shield Enclosure with interlock
• Advanced grounding concept
• Maximum protection from high-voltage shock for users and devices
• Common ground protection for all instruments
• EMI/light-tight shielded environment

• Power bypass inductance: 8 nH
• Standard DCQ probes have flat tip needles available in nickel-plated tungsten or BeCu with diameters of 0.75 mil, 1.0 mil and 1.5 mil.
• Supports collinear and non-standard needle configurations
• Up to 16 DC for standard; maximum of 24 DC for custom
• Ideal for probing the entire circuit for functional test
• DC probes can provide power or slow logic to circuit under test

• Built to Endure: Engineered with military-grade durability, IntelliShield is designed to withstand extreme temperatures, humidity, dust, and vibration. This high-temperature UPS ensures your critical systems continue to operate in the most harsh environments.
• Mission-Critical Reliability: Trusted in military and industrial applications, IntelliShield provides uninterrupted power backup to safeguard against power disruptions that could affect your operations.
• Seamless Integration: The IntelliShield can be easily and seamlessly integrated into your existing infrastructure with minimal downtime. Our units are designed for easy installation and compatibility with a wide range of equipment, it ensures power stability and smooth transitions.
• Extended Power Backup: With extended battery backup options, IntelliShield ensures your operations stay online during prolonged power outages, giving you the time needed to safely shut down systems or maintain productivity until power is restored.
• Peace of Mind Support: Our dedicated customer support team is available to assist from installation to End-of-Life, ensuring your Rugged UPS performs when you need it most.

Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight A-LFNA for On-wafer R&D Advanced Low-Frequency Noise Measurements

Customized Solutions for a Variety of Challenging Applications

We are your partner for challenging applications. Our comprehensive technical and application know-how over all probe system platforms and our expertise for customized products is based on an extensive experience over many years. We offer a special demo support in-house or at the customer, as well as after sales support for complicated setups.