Applications

Measurement Accuracy

• Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
• Minimize AC and spectral noise with effective shielding capability
• Achieve unsurpassed RF/mmW measurement and calibration accuracy with integrated RF tools and WinCal
• Shortest signal path test integration for accurate, thermally stable, and low-error data collection

Productivity

• Enables up to 5x faster time to accurate data
• Advanced 200 mm stage with increased test throughput
• High throughput UT/MT (Unattended Test over Multiple Temperatures) with VueTrack™ and High-Temperature Stability (HTS) technologies
• Automated wafer handling with optional loader
• Faster time to first data for standard and “hard to test” devices such as thin wafer, small pad and high power
• eVue digital imaging system with enhanced optical visualization, fast set-up, and in-die and wafer navigation
• Powerful automation tools reduce total test time on wafers, singulated dies, and modules

Positioning Accuracy

• Advanced 4-axis semi-automatic stage for accurate positioning and repeatable probe-to-pad contact
• Precision sub-micron positioning and active thermal compensations with motorized positioners and VueTrack PRO
• Additional quick “hands on” wafer positioning with manual ergonomic controls

Flexibility and application-tailored solutions

• RF/microwave device characterization, 1/f, WLR, FA and design debug
• Seamless integration between Velox and analyzers/measurement software
• Complete solutions using probe positioners and probe cards
• Versatile microscope mount system for fine-structure and large-area probing
• Full thermal range of -60°C to +300°C

Thermal Measurements

• Wide range of extremly performant, reliable thermal chuck systems from ATT
• Flexibility from hot only to full thermal range of -60°C to +300°C
• Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
• Up to 15% faster transition times than other systems in the market
• Patented MicroVac™ and FemtoGuard™ Technologies, providing ultra-low noise measurements and controlled leakage, low residual capacitance for repeatability and advanced measurement accuracy and speed
• Field-upgradeable: grows with your needs

Ease of use

• Comfortable and ergonomic operation
• Quick and comfortable manual wafer access via locking roll-out stage
• Easy on-screen navigation, wafer mapping, and operation of accessories and thermal systems with Velox

Velox Probe Station Control Software

• User-centered design minimizes training costs and enhances efficiency
• Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
• Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
• Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
• Loader integration – Easy creation of workflows and receipts and no need for any additional software
• VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle