FormFactor - Cascade eVue Microscope - Digital imaging system
- Maximized Field-of-View with Ultra-Sharp Image Quality
- Slim Design
- Patent-Pending Crash Protection
- Intelligent Lens Mount
- Application Flexibility
- Seamless Integration with Velox Probe Station Control Software
- Autonomous Measurement Assistants
- Remote Operation
See "Specifications & Details" tab for more information
Experience the future of digital imaging
The eVue V is the latest edition of FormFactor’s leading-edge digital imaging system. Equipped with new sensor technology and high-resolution optics, it is the perfect choice for ultra-precise on-wafer measurements, offering unsurpassed automation features that provide increased throughput and the highest productivity.
The eVue V is available for FormFactor’s automated and manual probe stations, seamlessly integrating with the Velox probe station control software. It is ideal for challenging applications, including IV/CV, small pad probing, ultra-low noise, RF/mmW, load-pull, high power, and silicon photonics.
The system features a large 20MP sensor and a range of high-quality optics, ensuring maximum optical resolution. Optimized with FormFactor’s unique Megapixel Mode, the eVue V delivers ultra-sharp image quality and video speed of up to 20 fps.
The slim design of the eVue V allows for seamless integration of frequency extenders and tuners, ensuring the shortest distance to the Device Under Test (DUT). This design significantly reduces insertion loss and maximizes accuracy for S-parameters and load-pull applications.
The eVue V incorporates FormFactor’s patent-pending crash detection technology, safeguarding valuable equipment from costly damage, even in the event of probe contact. If accidental contact occurs with the test equipment or probes, the microscope instantly halts all movements and retracts the objective lens. Additionally, users can define software fences in the Velox probe station control software, setting limits on microscope movement.
Objective lens exchange becomes easy and quick with the Intelligent Objective Lens Mount, which automatically detects the lens and retrieves associated calibration data. This feature enables faster time to measurement without the need for re-calibration.
As an integral part of FormFactor’s patented Autonomous RF and Autonomous DC Measurement Assistants, the eVue V enables real unattended use with accurate automated probe-to-pad alignment across a wide temperature range. It also includes continuous calibration monitoring and re-calibration, as well as automated probe cleaning.
Maximized Field-of-View with Ultra-Sharp Image Quality
The eVue V features a large 20MP sensor and a range of high-quality optics, providing maximum optical resolution. The system is optimized with FormFactor’s unique Megapixel Mode, enabling ultra-sharp image quality and video speed of up to 20 fps.
Slim Design
The slim design of the eVue V allows for seamless integration of frequency extenders and tuners, ensuring the shortest distance to the Device Under Test (DUT). This design significantly reduces insertion loss and maximizes accuracy for S-parameters and load-pull applications.
Patent-Pending Crash Protection
The eVue V comes with FormFactor’s patent-pending crash detection, which protects valuable equipment from expensive damage, even when probes are in contact. If accidental contact with the test equipment or probes occurs, the microscope will immediately halt all movements and retract the objective lens. Furthermore, the Velox probe station control software allows the definition of additional software fences, which restrict the range of microscope movement according to specified limits.
Intelligent Lens Mount
Objective lens exchange becomes easy and quick with the Intelligent Objective Lens Mount, which automatically detects the lens and retrieves associated calibration data. This feature enables faster time to measurement without the need for re-calibration.
Application Flexibility
The eVue V is a versatile system suitable for a wide range of applications, including IV/CV, small pad probing, RF/mmW, load-pull, high power, and silicon photonics. It is certified for high-voltage measurements and has been thoroughly tested to ensure accurate and reliable ultra-low noise measurements.
Seamless Integration with Velox Probe Station Control Software
The eVue V, combined with Velox software, offers up to eight detailed views for a thorough wafer examination. The Find Focus feature ensures clear images on uneven surfaces, while the CellView function enables easy navigation and analysis of previously unseen areas.
Autonomous Measurement Assistants
As an integral part of FormFactor’s patented Autonomous RF and Autonomous DC Measurement Assistants, the eVue V enables real unattended use with accurate automated probe-to-pad alignment across a wide temperature range. It also includes continuous calibration monitoring and re-calibration, as well as automated probe cleaning.
Remote Operation
The eVue V offers the convenience of remote operation, allowing users to access and control it from home or anywhere in the world via the Velox Probe Station Control Software.
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More Product Information
- Coaxial and triaxial measurements up to 10,000 V
- High-quality construction with low-noise electrical performance
- Replaceable probe tips in a variety of tip sizes
- Temperature range of of -60°C to 300°C
- Triaxial measurement ensures a much better understanding of device leakage in the off state
- Highly reliable, stable and repeatable measurements
- Integrally designed as part of a complete measurement solution
- Revolutionary technology advancement for wafer and die-level photonics probing
- Real-time in-situ calibrations
- Singulated die testing
- True die-level edge coupling
- In-situ power measurements
- Advanced calibration technologies
- Enables autonomous measurements
See "Specifications & Details" tab for more key features
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On-wafer power device characterization up to 10,000 V DC / 600 A
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Safe and convenient integration kits to support T.I.P.S. “LuPo” High Voltage / High Power Probe Cards
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Prevent thin wafers from curling and breaking
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Safety interlock system with clear enclosure for operator safety during device measurements
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Convenient connection kits for easy and safe system integration with power device analyzers from Keysight Technologies and major suppliers
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Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
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Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
See more Key Features on Specifications & Details tab
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Easy and fast setup of camera views
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Go to Light and Image Settings of the selected camera view with only one mouse click
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Guided workflows for wafer setups, alignment tools and Autonomous Assistants
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Workflow wizard shows task-relevant settings and options only
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Visualizes the progress of setup, alignment and measurement tasks
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Status information always at hand
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Informs the user about events, for example “Successful Alignment”
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Interacts with the user and helps with intelligent solutions
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For very complex wafer structures
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Enables automatic test of multiple devices in each die location before stepping to the next die
See more Key Features on Specifications & Details tab
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Wafer temp verified <4.5 K (with 44 RF probes in contact)
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Magnetic field suppression to <200 nT
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Easy exchange of customizable probe cards
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Configurable for 150 mm, 200 mm and 300 mm wafers
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Options for fully automated wafer load or manual
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Complete software suite for manual, semi-auto, or fully automated probing
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25 wafer cassette capacity for fully automated testing
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~15 minute cooldown time per wafer
See more Key Features in Specifications & Details tab
OptoVue
- Revolutionary technology advancement for wafer and die-level photonics probing
- Real-time in-situ calibrations
- Singulated die testing
- True die-level edge coupling
- In-situ power measurements
- Advanced calibration technologies
- Enables autonomous measurements
Horizontal Die-Level Edge Coupling
- Highest accuracy in test results
- Lowest coupling loss
- Repeatable measurement results due to exclusive automated fiber-to-facet alignment technology
- Reduced risk of damaging fibers with collision avoidance technology
- Ease of use for less experienced users
- Enables close simulation of real-world conditions with device performance closest to the final application
See "Specifications & Details" tab for more key features
The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.
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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Intuitive, manual drives
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Front loading capability through load door
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
See more Key Features on Specifications & Details tab
SlimVue Microscope
- Combined eye-pieces and CCD camera mount
- 3x zoom and quick lens exchange
- Quick lens exchange
- 1 um optical resolution
- Minimized scope footprint
- Fast change from navigation optics to high-resolution optics
- Resolving ‹ 50 μm pads
- Simple integration with any mmW modules
Application Specific Sigma Kits
- Engraved guides on mmW platen
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Adaptable to any mmW/sub-THz applications
- Seamless integration with any mmW modules and tuners
- Fast mounting and setup change
THz measurement capability
- Rock-solid mechanical design
- Submicron stage accuracy
- Optical feedback on platen and probe position (gauge)
- Motorized positioner
- <+-1 um separation repeatability
- Micrometer-accurate and repeatable probe placement and overtravel
- Highly-precise and stable THz measurements
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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