Applications

• Silicon Photonics

OptoVue

• Revolutionary technology advancement for wafer and die-level photonics probing
• Real-time in-situ calibrations
• Singulated die testing
• True die-level edge coupling
• In-situ power measurements
• Advanced calibration technologies
• Enables autonomous measurements

Horizontal Die-Level Edge Coupling

• Highest accuracy in test results
• Lowest coupling loss
• Repeatable measurement results due to exclusive automated fiber-to-facet alignment technology
• Reduced risk of damaging fibers with collision avoidance technology
• Ease of use for less experienced users
• Enables close simulation of real-world conditions with device performance closest to the final application

Wafer-Level Edge Coupling

• New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
• Minimized coupling losses with minimal trench dimensions
• Easy setup even for less experienced users
• Repeatable measurement results due to unique fiber-to-facet gap alignment technology
• Reduced risk of damaging fibers with collision avoidance technology

Vertical Coupling

• Industry standard for vertical coupling to wafer-level grating couplers
• Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
• Exclusive Pivot Point calibration determines the optimal point of minimal translation at the fiber/array tip
• Search First Light feature enables automated determination of initial position for optimization
• Other integrated features: Incident Angle Cal, Optical Rotation Scan, Optical Scan Data Analysis, Optical Tracking, Align Optical Probes

Thermal Capability

• Dark, shielded and frost-free
• -40°C to +125°C
• Only solution available that enables minimized air flow impact at cold temperatures to the fibers/fiber arrays for stable and repeatable measurement results
• Exclusive ITO-coated TopHat window for easy setup
• Enables hands-free autonomous calibration and re-calibration at multiple temperatures

Alliances Hold the Key to SiPh Test Solutions

• Strong Preferred Partnership with Keysight Technologies for measurement instrumentation
• Test Executive Automation with integration into Keysight Test Automation on Pathwave
• World class precision positioning as a Preferred Partner with Physik Instrumente (PI)
• Leveraging considerable expertise through an innovative engineering team

Exclusive Automated Calibrations

• Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
• Step-by-step wafer to probe height training
• CalVue utilizes uniquely designed retro-mirror technology to view all aspects of the fiber/array without external light and enables real-time in-situ automated calibrations
• Further exclusive calibration functions: motor calibration, z-displacement calibration, theta calibrations, pzt calibration, planarity calibrations, automatic pivot point calibration

Proven Performance

• Exclusive FormFactor-developed automated test methodology
• Demonstrates full performance of the positioning solution calibrated to the probe station by measuring the coupled power repeatability
• Verifies that the coupled power results across 900 measurements are within less than 0.3 dB
• In between each measurement, all solution elements are moved including the wafer chuck, hexapod stages and piezo stages
• Truly demonstrates the integrated performance and robustness of FormFactor’s Autonomous Silicon Photonics Measurement Assistant

FormFactor SiPh-Tools

• Powerful FormFactor-developed software package
• Includes a vast tool set for enabling and facilitating optical probing
• Automates manual tasks by integrating probe station machine vision capability with optical positioning and test equipment
• Features: Measurement Position Training, Wafer Training, Automated Alignment Functions, Calibration Wafer Verifications, Optical Alignment Verifications, Sub-Die Management
• Wide range of tools for capturing, logging and interpreting data

FormFactor Photonics Controller Interface (PCI)

• FormFactor-developed graphical user interface to manually control the optical positioning system
• Can also be used to setup scan parameter configurations and perform initial optical alignment functions
• Once aligned, all calibration functions are automated and performed through SiPh-Tools

Reconfigurable Fiber Arm

• Configurable between single fibers, fiber arrays and edge coupling holders
• Flexibility for engineering and volume environments
• After changing fiber holders, FormFactor’s automated calibration routines will have you back up and running in minutes
• Custom designed nanometer-accuracy integrated Z-Displacement sensor maximizes the testable area of the wafer and guarantees accurate and repeatable data collection