Focus Microwaves' Harmonic Tuners are engineered to enable precise control of impedance at the fundamental and harmonic frequencies (typically f₀, 2f₀, and 3f₀), making them essential for nonlinear device characterization and power amplifier design.

These tuners feature multiple cascaded probes within a single tuner body, allowing independent or simultaneous tuning at multiple frequencies. Their robust design ensures high tuning accuracy, minimal insertion loss, and excellent repeatability across a broad frequency range. Harmonic tuners are the ideal solution for advanced Load Pull measurements where harmonic control is critical.

• Accommodates a combination of up to four Cascade Microtech probes
• Configurable for mixed-signal RF/mmW testing
• Quick and easy repairs to be performed in the field, by simply replacing individual probes
• Adaptable to new device layouts by exchanging individual probes

Floating Action Buttons

• Easy and fast setup of camera views
• Go to Light and Image Settings of the selected camera view with only one mouse click

Workflow Wizard

• Guided workflows for wafer setups, alignment tools and Autonomous Assistants
• Workflow wizard shows task-relevant settings and options only
• Wizard settings can be corrected anytime – no need to restart the wizard
• Wizard helps with intelligent solutions in case of error

See "Specifications & Details" tab for more key features

• Full-radius, nickel-plated tungsten needles
• Power bypass inductance: 16 nH
• Supports collinear and non-standard needle configurations
• Support up to a maximum of 12 ceramic blades DC needles / contacts
• Ideal for probing the entire circuit for functional test
• DC probes can provide power or slow logic to circuit under test

• Coaxial and triaxial measurements up to 10,000 V
• High-quality construction with low-noise electrical performance
• Replaceable probe tips in a variety of tip sizes
• Temperature range of of -60°C to 300°C
• Triaxial measurement ensures a much better understanding of device leakage in the off state
• Highly reliable, stable and repeatable measurements
• Integrally designed as part of a complete measurement solution

Superior Mechanics

• Highly stable granite base
• Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
• 1 µm repeatable separation stroke
• Excellent measurement accuracy and repeatability
• Fast navigation and high-precision probe positioning

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Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight PDA for On-wafer R&D Power Semiconductor Device Characterization Measurements

Three Probe Technologies

• Infinity Probe: best for Al (Si)
• ACP Probe: best for AU (III-Vs)
• |Z| Probe: robust solution (long lifetime)
• Precision contact on a wide variety of materials from 26 GHz to 67 GHz
• Accurate results with excellent crosstalk
• Matching cables and substrates included

Precise Contact Solution

• RF chuck ±3 μm surface planarity
• Unique 500 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
• Precision probe alignment
• Consistent contact force and overtravel
• Stable contact performance

WinCal Calibration Software

• Exclusive 1-, 2-, 3-, and 4-port on-wafer calibration algorithms
• Automated calibration monitoring
• Unique measurement & analysis methods
• Accurate S-parameter measurements
• Automatic calibration setup for higher efficiency
• Fast and easy data interpretation and reporting

Flexibility

• Different substrate carriers for wafers up to 200 mm or single dies
• Probe cards and/or up to eight positioners
• Optional thermal chuck (-60°C to 300°C) and pressure regulation
• Accessories available, such as black bodies and optical motion analysis tools
• Optional upgrade for 300 mm wafer
• Designed for industrial environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
• Ideal for small structures

See "Specifications & Details" tab for more key features