FormFactor - Cascade Multiline TRL Cal Substrates - Multiline TRL substrates for T-Wave probes
-
Substrate material: High-resistivity silicon
-
Substrate thickness: 275 µm
-
Dielectric constant: 11.8
-
Nominal Z0: 50 Ω
Millimeter- and submillimeter-wave calibration substrates, optimized for T-Wave™ probes. The multiline TRL calibration substrates offer CPW standards including reflect (short), thru and two lines and are recommended to use with WinCal XE™ calibration software. Some off-set short and off-set open structures are included for additional measurements.
Impedance Standard Substrate Maps
Part Number | Description | Pitch (μm) |
Multi-line TRL Substrate, WR1.0, WR2.2, WR3.4, WR4.3, WR5.1 |
25 | |
Multi-line TRL Substrate, WR2.2, WR3.4, WR4.3, WR5.1 | 50 | |
Multi-line TRL Substrate, WR3.4, WR4.3, WR5.1 | 75 and 100 |
More Product Information

-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Intuitive, manual drives
-
Front loading capability through load door
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer

-
Supports up to 12 VNA ports than can be mapped to four logical ports for calibration
-
Extensive guidance, wizards and management features automate calibration setup, measurement, result data conversion and report creation
-
LRRM-SOLT, multi-line TRL and second-tier calibration methods enable precision and simple multi-port calibrations
-
Automatic load inductance compensation function ensures the most repeatable calibrations
-
Easy to use Probe to ISS/CSR matching tool
-
Additional remoting methods
-
Interface with Velox™ over LAN


-
Customizable sample space to fit the user’s application
-
Long holding time: 100 hours for six (6) STP liter He-3 gas
-
Stable He-3 pot temperature: Separate sippers for 1K pot and the charcoal sorb cooling line; +/- 0.5 mK at base temperature
-
Low noise
-
Multiple operation modes: He-3 cryostat can be operated without pumping the 1K pot (referred to as 4K operation mode)

-
Low running costs, less vibration, less noise, reduced maintenance
-
Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
-
CMN calibrated thermometry on MC plate
-
Operation via touch panel controller: Remote operation via ethernet interface

-
Combined eye-pieces and CCD camera mount
-
3x zoom and quick lens exchange
-
Engraved guides on mmW platen
-
Supports broadband, load pull, coax RF and banded waveguide configuration
-
Rock-solid mechanical design
-
Submicron stage accuracy

-
Low running costs, less vibration, less noise, reduced maintenance
-
Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
-
CMN calibrated thermometry on MC plate
-
Operation via touch panel controller: Remote operation via ethernet interface

-
Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
-
Enables up to 5x faster time to accurate data
-
Advanced 4-axis semi-automatic stage for accurate positioning and repeatable probe-to-pad contact
-
RF/microwave device characterization, 1/f, WLR, FA and design debug
-
Wide range of extremly performant, reliable thermal chuck systems from ATT
-
Easy on-screen navigation, wafer mapping, and operation of accessories and thermal systems with Velox
-
User-centered design minimizes training costs and enhances efficiency


FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
