FormFactor - Cascade T-Wave Probe - Wafer-level electrical measurement of mmW devices and materials up to 1.1 THz
T-Wave Waveguide Banded Probes
- Low insertion loss
- Low contact resistance
- 140 GHz – 1.1 THz versions
- Probe pitch as narrow as 25 μm
- Lithographically-defined probe tip
- Nickel contacts
See "Specifications & Details" tab for more key features
T-Wave Probes set the industry performance standard for on-wafer measurements of millimeter and submillimeter wavelength devices. T-Wave Probes include both waveguide banded probes and broadband (dual band) probes.
T-Wave Broadband (Dual Band) Probes
- kHz to 170 GHz and kHz to 220 GHz versions available
- Low insertion loss
- Low contact resistance
- On Probe Integrated diplexer for integrating the coax and Wave Guide bands
- Probe pitch as narrow as 50 μm
- Lithographically defined probe tip
- Nickel contacts
- Exclusively available for use with the following system setup:
- FormFactor Probe systems using RFA probe arms with 45° dual frequency extender mounts
- Keysight 5291A VNA with integral 220 GHz single sweep capability
- Plus the Keysight M4 heads pared with the VDI Mini extended range frequency extenders
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More Product Information
- The DL225 series of square coaxial lights features a modular heat sink and circuit design for enhanced performance, product availability and lead time.
- These coaxial lights are available in a wide variety of wavelengths from UV to IR.
- They provide intensities from 18kLux for the DL225-025 to approximately 50kLux for the larger models.
Optimized Measurement Setup
- Multi-purpose SIGMA instrument integration kit
- Shorter cabling and universal chuck connection
- Triax probe with protected guard
- Optimized signal path
- Safe probe tip exchange
- Seamless integration of various analyzers
High Power Chuck
- Triax design for low-leakage measurements up to 3 kV
- Special chuck surface coating
- High-isolation ready
- High-current measurement up to 100 A with lowest contact resistance
- Optional upgrade for 10 kV (coax) operating voltage
- Thin wafer handling capability
Safe Operation
- Arcing protection
- Shield Enclosure with interlock
- Advanced grounding concept
- Maximum protection from high-voltage shock for users and devices
- Common ground protection for all instruments
- EMI/light-tight shielded environment
- Combine up to 12 fail-safe building blocks, dual SPDT, SP4T, SP6T, or transfer switch in a compact 1U footprint
- Front “pluggable” relays facilitate field maintenance
- Embedded web interface provides interactive utility to monitor and control relays from anywhere in the world
- Flexible API supports IVI and Linux development environments minimizing software investment
- LXI Trigger Event implementation provides seamless test synchronization with external devices
- Store up to 128 relay state configurations for quick recall, including an automatic power up state
- Define exclude lists to avoid setting an undesirable configuration
- Relay odometer tracks closures to facilitate preventative maintenance
Unlock precise nonlinear transistor behavior representation with our Cardiff Model portfolio. Improve accuracy across a wide impedance space effortlessly.
- The SL164 is characterized as a Compact High Intensity Spot Light with sufficient thermal management to provide 200kLux at a working distance of 4” (100mm).
- A very wide range of wavelengths are available from UV to IR.
- Multiple beam spreads are also available as is a diffuser option.
The VectorStar ME7838 Series broadband VNA offers the widest available single frequency sweep from 70 kHz to 110, (ME7838AX to 125), (ME7838EX to 125), to 145 GHz, and to 220 GHz with mmWave bands to 1.1 THz.
- The ME7838AX or ME7838EX version can easily be upgraded to 145 GHz and to 220 GHz
- All versions may be configured to include banded millimeter-wave modules up to 1.1 THz
- Industry-best calibration and measurement stability: 0.1 dB vs 0.6 dB over 24 hrs.
- All versions support the 3744x-Rx receiver for noise figure measurements, including the ability to characterize differential noise figure, to 125 GHz
- Compact, lightweight mmWave modules (0.6 lb vs 7+ lbs and 1/50 the volume) offer low cost installation on smaller probe stations.
- Enables wafer probing up to 100 A pulsed and 10A DC
- Innovative multi-fingertip design provides even distribution of current
- Supports up to 500 V
- Replaceable Tungsten probe tips
- Temperature range of -60°C to 300°C
- Minimal contact resistance at the pad-tip junction to reduce heating during measurements, with fewer probe marks
- Prevents against thermal runaway
- Measure devices on wafer at higher currents than ever before
- Small scrub minimizes damage to aluminum pad
- Small footprint – tip fits on a 1 mm pad
- Lithographic thin-film construction
- Excellent crosstalk characteristics
- Non-oxidizing nickel alloy tips
- Innovative force delivery mechanism
- 40GHz, 50GHz, 67GHz, 110GHz and 145GHz connectors available
- GSG, SG, GS, GSGSG, GSSG, SGS configurations
- 50 to 250 µm pitches (other pitches available on request)
- High current version (2 A) available
Advantages
- Superior field confinement reduces unwanted couplings to nearby devices and transmission modes
- Superior measurement accuracy and repeatability
- Small scrub minimizes damage to aluminum pad
- Typical contact resistance < 0. 05 Ω on Al, <0.02Ω on Au
- Save valuable wafer space and reduce pad parasitics by being able to shrink pad geometries to 25 x 35 µ m (best case)
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Ease of use – Less experienced operators can perform DC measurements by simply pushing a button. This reduces the need of experienced users full time on each system.
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Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
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Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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