FormFactor - HPD Wet DR Series - Wet Dilution Refrigerator Systems
-
Proven technology: designed in conjunction with several top STM groups in the world
-
Quiet, low vibration operation
-
Low running costs and reduced maintenance
-
Easy operation and fast cool-down; load sample when the system is cold for TL models
-
Calibrated RuO and CMN thermometry read by model 372S resistance bridge are installed on the mixing chamber plate
FormFactor’s wet dilution refrigerators has two series of products: the Wet DR-50/250/500 and Wet DR-50-TL/250-TL/500-TL.
Both series of dilution refrigerators enable easy and cost-effective cooling to temperatures between 35 to 10 mK.
The sample of Wet DR-50/250/500 systems is located in a normal vacuum (HV) space. It can be loaded when the system is warm with the vacuum can open.
The TL series has been optimized for scanning tunneling microscopy (STM) applications. The sample can be loaded into the ultra-high vacuum (UHV) space from the top of the dilution refrigerator insert when the cryostat is cold.
Custom wiring is available.
Both fully automated and manually operated gas handling systems are available.
Document
More Product Information
-
Multi-purpose SIGMA instrument integration kit
-
Shorter cabling and universal chuck connection
-
Triax probe with protected guard
-
Triax design for low-leakage measurements up to 3 kV
-
Special chuck surface coating
-
High-isolation ready
-
Arcing protection
-
Shield Enclosure with interlock
-
Advanced grounding concept
See more Key Features on Specifications & Details tab
-
High power – 66 W at 2.4 GHz and 43 W at 5 GHz
-
Extremely low insertion loss of ≤ 0.4 dB (typical) up to 40 GHz
-
Excellent contact control and low contact resistance
-
High performance on any pad material (Al or Au)
-
Longest lifetime – typically one million (1,000,000) touchdowns
-
Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
-
Re-configurable and upgradable as requirements grow
-
Minimizes setup times with no loss in performance or accuracy
-
Seamless integration of various measurement instruments
-
Solid station frame
-
Built-in vibration-isolation solution for superior vibration attenuation
-
Rigid microscope bridge
-
Compact and rigid mechanical design
-
Highly accurate measurement results
-
Incorporates best-known methods
-
Ergonomic and straightforward design for comfortable and easy operation
-
Low-profile design
-
Simple microscope operation
-
Quick and ergonomic change of DUT through pull-out stage
-
Minimize training efforts
-
Fast time to data
-
Convenient operation
-
Fully isolated experiment space for true 4K temperatures during probing
-
Cryogenic positioners to provide large travel ranges without warming up the device
-
Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
-
A soft vacuum bellows provides a compliant mounting interface for the cryocooler
-
Quick release vacuum feedthroughs for easy configurability
-
A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
-
Supports up to 12 VNA ports than can be mapped to four logical ports for calibration
-
Extensive guidance, wizards and management features automate calibration setup, measurement, result data conversion and report creation
-
LRRM-SOLT, multi-line TRL and second-tier calibration methods enable precision and simple multi-port calibrations
-
Automatic load inductance compensation function ensures the most repeatable calibrations
-
Easy to use Probe to ISS/CSR matching tool
-
Additional remoting methods
-
Interface with Velox™ over LAN
-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Intuitive, manual drives
-
Front loading capability through load door
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer
See more Key Features on Specifications & Details tab
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
-
Accommodates a combination of up to four Cascade Microtech probes
-
Configurable for mixed-signal RF/mmW testing
-
Quick and easy repairs to be performed in the field, by simply replacing individual probes
-
Adaptable to new device layouts by exchanging individual probes
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight PNA for On-wafer R&D Measurements from RF to millimeter wave to Terahertz
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
Download Line Card
