FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant

  • Revolutionary technology advancement for wafer and die-level photonics probing
  • Real-time in-situ calibrations
  • Highest accuracy in test results
  • Lowest coupling loss
  • New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
  • Minimized coupling losses with minimal trench dimensions
  • Industry standard for vertical coupling to wafer-level grating couplers
  • Dark, shielded and frost-free
  • -40°C to +125°C
  • Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
  • Exclusive FormFactor-developed automated test methodology
  • FormFactor-developed graphical user interface to manually control the optical positioning system
  • Configurable between single fibers, fiber arrays and edge coupling holders
See more Key Features on Specifications & Details tab

Applications

  • Silicon Photonics

OptoVue

  • Revolutionary technology advancement for wafer and die-level photonics probing
  • Real-time in-situ calibrations
  • Singulated die testing
  • True die-level edge coupling
  • In-situ power measurements
  • Advanced calibration technologies
  • Enables autonomous measurements

Horizontal Die-Level Edge Coupling

  • Highest accuracy in test results
  • Lowest coupling loss
  • Repeatable measurement results due to exclusive automated fiber-to-facet alignment technology
  • Reduced risk of damaging fibers with collision avoidance technology
  • Ease of use for less experienced users
  • Enables close simulation of real-world conditions with device performance closest to the final application

Wafer-Level Edge Coupling

  • New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
  • Minimized coupling losses with minimal trench dimensions
  • Easy setup even for less experienced users
  • Repeatable measurement results due to unique fiber-to-facet gap alignment technology
  • Reduced risk of damaging fibers with collision avoidance technology

Vertical Coupling

  • Industry standard for vertical coupling to wafer-level grating couplers
  • Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
  • Exclusive Pivot Point calibration determines the optimal point of minimal translation at the fiber/array tip
  • Search First Light feature enables automated determination of initial position for optimization
  • Other integrated features: Incident Angle Cal, Optical Rotation Scan, Optical Scan Data Analysis, Optical Tracking, Align Optical Probes

Thermal Capability

  • Dark, shielded and frost-free
  • -40°C to +125°C
  • Only solution available that enables minimized air flow impact at cold temperatures to the fibers/fiber arrays for stable and repeatable measurement results
  • Exclusive ITO-coated TopHat window for easy setup
  • Enables hands-free autonomous calibration and re-calibration at multiple temperatures

Alliances Hold the Key to SiPh Test Solutions


Exclusive Automated Calibrations

  • Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
  • Step-by-step wafer to probe height training
  • CalVue utilizes uniquely designed retro-mirror technology to view all aspects of the fiber/array without external light and enables real-time in-situ automated calibrations
  • Further exclusive calibration functions: motor calibration, z-displacement calibration, theta calibrations, pzt calibration, planarity calibrations, automatic pivot point calibration

Proven Performance

  • Exclusive FormFactor-developed automated test methodology
  • Demonstrates full performance of the positioning solution calibrated to the probe station by measuring the coupled power repeatability
  • Verifies that the coupled power results across 900 measurements are within less than 0.3 dB
  • In between each measurement, all solution elements are moved including the wafer chuck, hexapod stages and piezo stages
  • Truly demonstrates the integrated performance and robustness of FormFactor’s Autonomous Silicon Photonics Measurement Assistant

FormFactor SiPh-Tools

  • Powerful FormFactor-developed software package
  • Includes a vast tool set for enabling and facilitating optical probing
  • Automates manual tasks by integrating probe station machine vision capability with optical positioning and test equipment
  • Features: Measurement Position Training, Wafer Training, Automated Alignment Functions, Calibration Wafer Verifications, Optical Alignment Verifications, Sub-Die Management
  • Wide range of tools for capturing, logging and interpreting data

FormFactor Photonics Controller Interface (PCI)

  • FormFactor-developed graphical user interface to manually control the optical positioning system
  • Can also be used to setup scan parameter configurations and perform initial optical alignment functions
  • Once aligned, all calibration functions are automated and performed through SiPh-Tools

Reconfigurable Fiber Arm

  • Configurable between single fibers, fiber arrays and edge coupling holders
  • Flexibility for engineering and volume environments
  • After changing fiber holders, FormFactor’s automated calibration routines will have you back up and running in minutes
  • Custom designed nanometer-accuracy integrated Z-Displacement sensor maximizes the testable area of the wafer and guarantees accurate and repeatable data collection

More Product Information

FormFactor, Inc.

FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test. 

We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.


Contact Details 

FormFactor, Inc. Corporate Headquarters

7005 Southfront Road, Livermore, CA 94551, USA

Phone: 925-290-4000 

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Test & Measurement

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FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant
FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant
FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant
FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant