Overview
Specifications & Details
Datasheets & Downloads
Videos

Floating Action Buttons

Easy and fast setup of camera views
Go to Light and Image Settings of the selected camera view with only one mouse click

Workflow Wizard

Guided workflows for wafer setups, alignment tools and Autonomous Assistants
Workflow wizard shows task-relevant settings and options only
Wizard settings can be corrected anytime – no need to restart the wizard
Wizard helps with intelligent solutions in case of error

See "Specifications & Details" tab for more key features

Manufactured By: FormFactor, Inc.

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Windows 10 compatible – User-centered design – Efficient and robust. Experience the new Velox™ 3 probe station control software!

Velox™ is FormFactor’s unique software suite for 200 mm and 300 mm wafer probe stations. It is the universal standard for semi- and fully-automated systems, enabling seamless communication between the user and more than 15 different platforms.

Velox reduces total cost of ownership by minimizing training efforts and providing faster time to robust and reliable data. As a key element of FormFactor’s exclusive Contact Intelligence™ technology for autonomous operation, it allows the user to perform measurement tasks faster, safer and more accurately. Velox enables safe and fast wafer loading, easy test automation and measurement system integration, while preventing costly damage of probes and probe cards throughout the entire measurement cycle.

Velox is installed on more than 2,100 FormFactor probe stations. Strong customer relationships and continuing advancements make Velox software the clear leader in probe station control.

New in Velox 3

Velox Dash™

A Modern Touchscreen-Based Interface for Intuitive Probe Station Control

FormFactor’s new companion device is here! Velox Dash™ enhances probe station control by providing access to the most used functionalities with just a touch of a finger. With its modern user interface, Velox Dash sets a standard for easy-to-use operation of engineering probe stations. The companion device combines an intuitive touch interface with an adaptable workplace. Additionally, Velox Dash consolidates the functionalities of hardware joystick and eVue remote control into a single platform. The novel Velox Dash’s user-centred design makes daily work a gratifying experience.

User-centered Design with New Icons and Skins

For a modern look-and-feel we introduced a new color concept. All icons were thoroughly redesigned and are now better identifiable. Still, they are at the same place as before and instantly recognizable. Process- and safety-relevant information – such as the contact or the different stages in the Control Center – is clearly highlighted. Additionally, it is now easier to distinguish between application icons – such as Spectrum or SetupTool, and functional icons – such as AutoAlign or Light on/off.

Progress Bar

Visualizes the progress of setup, alignment and measurement tasks
Status information always at hand

Toast Notifications

Informs the user about events, for example “Successful Alignment”
Interacts with the user and helps with intelligent solutions

Motorized Positioner Manager

For very complex wafer structures
Enables automatic test of multiple devices in each die location before stepping to the next die
Changes probe layouts automatically for each die
Simple and easy to create and modify layouts
No programming necessary
Easy integration with test executive software

Augmented Align

Improves RF, mmW and THz measurement accuracy and simplifies probe positioning
Provides location markers on the screen that help the user know exactly where the probes will land, even if they cannot be seen due to being out of focus.
Particularly helpful on THRU standards where the standard geometry makes it difficult to judge the offset from the edge of the pad.
Interacts with WinCal: depending on their calibration substrate, users can either read FormFactor-predefined overlays or add a custom grouping of overlays.

Selective Die Soaking

New level of wafer testing efficiency for non-ambient probing
User can define soak times for each die
Easy-to-use graphical interface

Selective Die Alignment

User can define which dies need alignment
No complex adaptations of the Test
Executive necessary

Sub Die Handling

Subdies can be labeled with different colors for better differentiation
Drag/drop subdies to different positions in table
Select multiple subdies in table
Filter by labels

CONTACT INTELLIGENCE TECHNOLOGY

Non-Stop Autonomous Semiconductor Test

With FormFactor’s unique Contact Intelligence technology, Velox 3 enables 24/7 autonomous semiconductor test. Contact Intelligence combines smart hardware design, innovative software algorithms and years of experience to create a technology that provides benefits across a wide range of applications. This allows lengthy test routines to be performed overnight or the weekend without operator intervention – even over a wide temperature range. Contact Intelligence accelerates time to accurate data, time to market and ultimately – time to profitability.

SECS/GEM

Improving your Production Processes

SECS/GEM interfaces are a SEMI-standard industry-specific integration layer for semiconductor production. SECS/GEM interfaces establish the connection between the system and the higher level. Production and plant data, alarms, process values, process parameters etc. are transferred via SECS/GEM.

AUTOALIGN

Quickest Wafer Alignment and Mapping

Velox AutoAlign is the most ergonomic and quickest way to align a wafer in X, Y and theta and determine the wafer diameter and die size. It generates a wafer map corresponding to the evaluated die indices and number of recognized dies in both axes.

VUETRACK

VueTrack™ enables unattended testing over multiple temperatures for positioners or probe cards by automaticall aligning probes to pads, utilizing the eVue Pro microscope. VueTrack eliminates the need for manual re-adjustment and ensures constant contact quality.

REALIGN

Automatically Aligning Probe to Pads

ReAlign™ enables unattended testing over multiple temperatures for probe cards on the CM300xi probe station by automatically aligning probes to pads, utilizing three system-integrated cameras. It is recommended especially for applications with limited microscope view, such as vertical and Pyramid probe cards, or when using a test head.

CELLVIEW

CellView allows you to easily navigate and orientate on parts of the wafer that are out of view.

WORKFLOW GUIDE

Easy Step-by-Step Guidance

The Velox Workflow Guide enables unexperienced users to perform successful measurements by guiding the operator step-by-step through different processes, no matter if these are simple procedures or complex measurements.

VELOX SETUP TOOL

All Global Settings in One Place

The Velox Setup Tool combines all global Velox settings in one place – from autostart preferences, interface and device settings to license management. This simplifies the setup process, reduces training needs and safes time. Further Velox settings, such as for Control Center, WaferMap and Spectrum, will be successively integrated into the Setup Tool with the next Velox versions.