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Different substrate carriers for wafers up to 150 mm or single dies
Up to six positioners
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Highly stable granite base
Independent, coarse movement of X and Y axes, combined with easy fine adjustments
Re-configurable for DC, RF, mmW, FA, WLR and more
Full thermal range of -60°C to +300°C
Highly stable granite base
Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
Re-configurable for DC, RF, mmW, FA, WLR and more
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Independently cooled cold shield
Probe positioners placed inside vacuum chamber
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Probe positioners placed inside vacuum chamber
Short and stable probe arms
DC, RF and Optical Probe Positioning for Highest Accuracy Measurements
FormFactor offers a wide variety of manual and motorized probe positioners for any application from DC to terahertz measurements and beyond.
Light-tight version and EMI-shielded version for low noise and light-sensitive measurements
Application flexibility, ideal for use in high frequency applications
Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system
Re-configurable for DC, RF, mmW, FA, WLR and more
Thermal range: -60˚C to 300˚C available
Upgrade path to meet your future needs
Stable and repeatable measurements over a wide thermal range
Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
Enables up to 5x faster time to accurate data
On-wafer power device characterization up to 10,000 V DC / 600 A
Safe and convenient integration kits to support T.I.P.S. “LuPo” High Voltage / High Power Probe Cards
Prevent thin wafers from curling and breaking
Advanced MicroVac chuck surface for minimum contact resistance between wafer and chuck
Safety-rated interlock system for high-power testing (meets EN 60947-5-1, EN 60204-1)
Easy and fast setup of camera views
Go to Light and Image Settings of the selected camera view with only one mouse click
Guided workflows for wafer setups, alignment tools and Autonomous Assistants
Workflow wizard shows task-relevant settings and options only