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Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight Photonics Application
Lithographic thin-film construction
Excellent crosstalk characteristics
Non-oxidizing nickel alloy tips
Innovative force delivery mechanism
40GHz, 50GHz, 67GHz, 110GHz and 145GHz connectors available
GSG, SG, GS, GSGSG, GSSG, SGS configurations
50 to 250 µm pitches (other pitches available on request)
High current version (2 A) available
Advantages
Probe loss is 3 dB typical between 140 and 200 GHz, S11/S22 15 dB typical
Reduced unwanted couplings and transmission modes
Able to shrink pad geometries to 25 x 35 µm (best case)
Typical contact resistance < 0.05 Ω on Al, < 0.02 Ω on Au
WR15, WR12, WR10, WR8, WR6, WR4, WR3, and WR2 bands available.
Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
Durable probe structure ensures more than 250,000 contacts
Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications
Next Generation Wafer Probing
Continues the Infinity family’s Industry leading electrical performance
High temperature capability (175° C +) for automotive device characterization and other applications
Better tip visibility for enhanced placement accuracy and repeatability
Improved tip life/durability with solid rhodium contacts
New tip architecture enables support for narrower pitches (e.g. 25um)
Advanced mechanical design combined with small contacts enables probing on smaller pads/pitches and improves durability and robustness
The LWP series Lightwave Probe enables optical measurements for on-wafer and hybrid photonics devices. It features user replaceable fiber pigtails allowing the probe to be optimized for a variety of light delivery and light collection applications including the characterization of topside illuminated photodiodes, Vertical Cavity Surface Emitting Lasers (VCSELs), hybrid transmitters and receivers, and LEDs.
Flexibility
Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
Re-configurable and upgradable as requirements grow
Minimizes setup times with no loss in performance or accuracy
Seamless integration of various measurement instruments
Stability
Solid station frame
Built-in vibration-isolation solution for superior vibration attenuation
Rigid microscope bridge
Compact and rigid mechanical design
Highly accurate measurement results
Incorporates best-known methods
Ease of Use
Ideal for multiport RF/Microwave and high-speed digital signal testing
Mix DC and RF/Microwave signals on one probe
Long lifetime – typically over one million (1,000,000) touchdowns
Excellent performance in temperatures ranging from 10 K to 200°C
Probe on any pad material with no damage
Substrate material: High-resistivity silicon
Substrate thickness: 275 µm
Dielectric constant: 11.8
Nominal Z0: 50 Ω
Die-to-die stepping time of under 100 ms
Up to 20 dies/sec (70,000 dies/hour) with MultiDie Testing technology
Even extreme variations in height, such as the case with warped wafers, can be compensated
Flexibility
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Use with liquid nitrogen or helium, depending on the target temperature. Or use of cryo-cooler for dry-cooling option.
Accessories available, such as black bodies and optical motion analysis tools
Optional upgrade for 300 mm wafer
Designed for industrial environments
Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
Ideal for small structures
See "Specifications & Details" tab for more key features
Flexibility
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Optional thermal chuck (-60°C to 300°C) and pressure regulation
Accessories available, such as black bodies and optical motion analysis tools
Optional upgrade for 300 mm wafer
Designed for industrial environments
Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
Ideal for small structures
See "Specifications & Details" tab for more key features