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Enables coaxial measurements up to 10,000 V and 300 A pulsed (600 A in a parallel configuration) with a single touchdown Even distribution of high current with innovative multi-fingertip design Compatible with TESLA 200/300 mm power device characterization system
Up to 12 contacts; any contact can be DC, Power, Logic to 500 MHz,or RF to 20 GHz Online design configuration tool helps you to specify your probe in minutes All designs are fully quadrant compatible
Easy and fast setup of camera views Go to Light and Image Settings of the selected camera view with only one mouse click Guided workflows for wafer setups, alignment tools and Autonomous Assistants Workflow wizard shows task-relevant settings and options only
Designed for use with specific Probe Systems Tables to suit all facility requirements and applications Stable probing, even in submicron range Granite platen ensures rigidity and temperature stability
Supports up to 12 VNA ports than can be mapped to four logical ports for calibration Extensive guidance, wizards and management features automate calibration setup, measurement, result data conversion and report creation LRRM-SOLT, multi-line TRL and second-tier calibration methods enable precision and simple multi-port calibrations
Full-radius, nickel-plated tungsten needles Power bypass inductance: 16 nH Supports collinear and non-standard needle configurations Support up to a maximum of 12 ceramic blades DC needles / contacts
Cryogen-free option available Flexible sample space Low noise, low vibration Long holding time Stable He-3 pot temperature
Load-lock chamber: Cycle devices 10X faster in a cryogenic environment High-density electrical interface at cryogenic temperatures: More pins on the device enables more test structures to be probed with a single cooldown
Wafer temp verified <4.5 K (with 44 RF probes in contact) ​ Magnetic field suppression to <200 nT Easy exchange of customizable probe cards Configurable for 150 mm, 200 mm and 300 mm wafers
Low running costs, less vibration, less noise, reduced maintenance Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates CMN calibrated thermometry on MC plate
Low running costs, less vibration, less noise, reduced maintenance Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates CMN calibrated thermometry on MC plate
Low running costs, less vibration, less noise, reduced maintenance Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates CMN calibrated thermometry on MC plate